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A Nanorobotic System for In Situ Stiffness Measurements on Membranes

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5 Author(s)
Jean-Ochin Abrahamians ; Inst. des Syst. Intelligents et de Robot., Univ. Pierre et Marie Curie, Paris, France ; Bruno Sauvet ; Jérôme Polesel-Maris ; Rémy Braive
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In order to characterize the mechanical behavior of fragile resonant microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS), nondestructive measurements are required. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-fork-based dynamic force sensor inside a scanning electron microscope (SEM). Experiments are conducted individually on a batch of InP membranes 200 nm thin, using a 9-degree-of-freedom (dof) nanomanipulation system, complemented with virtual reality and automation tools. Results provide stiffness values in the range of a few newton per meter, with variations in a single sample depending on the membrane models.

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IEEE Transactions on Robotics  (Volume:30 ,  Issue: 1 )