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A novel pneumatic actuator system realised by microelectro-discharge machining

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8 Author(s)
Hirata, T. ; Sumitomo Heavy Ind. Ltd., Kanagawa, Japan ; Akashi, T. ; Bertholds, A. ; Gruber, H.P.
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This paper presents a one-dimensional pneumatic actuator fabricated by combining several micromachining technologies such as microelectro-discharge machining (micro-EDM) as well as isotropic and anisotropic wet-etching. Unlike the existing pneumatic actuators, which usually convey the object by means of friction, this device employs the dynamic pressure of inclined driving jets in order to enhance the horizontal transportation performance. Typical slider speeds of 4 to 5 cm/s can be obtained. Comparisons are presented between different types of sliders. By an appropriate patterning of the slider bottom surface, the speed could be increased by 50% to 60%. Similarly a maximum tangential force of 20 μN was obtained using this dynamic pressure concept. The latter is about two times larger than that of a slider with a smooth surface

Published in:

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Date of Conference:

25-29 Jan 1998