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Microdispenser With Continuous Flow and Selectable Target Volume for Microfluidic High-Pressure Applications

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3 Author(s)
Boden, R. ; Dept. of Eng. Sci., Uppsala Univ., Uppsala, Sweden ; Ogden, S. ; Hjort, K.

This paper presents a reusable microdispenser intended for continuous flow dispensing of variable and controlled volumes of liquid against high back-pressures. The microdispenser consists of two active valves and a dispenser chamber, all actuated by the volume change associated with the solid-to-liquid phase transition of paraffin wax. It is fabricated using stainless steel sheets, a flexible printed circuit board, and a polyimide membrane. All are covered with Parylene C for insulation and fusion bonding at assembly. A finite element method (FEM) model of the paraffin actuator is used to predict the resulting flow characteristics. The results show dispensing of well-defined volumes of 350 and 540 nL, with a good repeatability between dispensing sequences, as well as reproducibility between devices. In addition, the flow characteristics show no back-pressure dependence of the dispensed flow in the interval 0.5-2.0 MPa. The FEM model can be used to predict the flow characteristics qualitatively.

Published in:

Microelectromechanical Systems, Journal of  (Volume:23 ,  Issue: 2 )