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Electrostatic discharge in semiconductor devices: an overview

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2 Author(s)
J. E. Vinson ; Reliability Eng. Dept., Harris Corp., Melbourne, FL, USA ; J. J. Liou

Electrostatic discharge (ESD) is an event that sends current through an integrated circuit (IC). This paper reviews the impact of ESD on the IC industry and details the four stages of an ESD event: (1) charge generation, (2) charge transfer, (3) device response, and (4) device failure. Topics reviewed are charge generation mechanisms, models for ESD charge transfer, electrical conduction mechanisms, and device damage mechanisms leading to circuit failure

Published in:

Proceedings of the IEEE  (Volume:86 ,  Issue: 2 )