Cart (Loading....) | Create Account
Close category search window

Litho Machine Scheduling With Convex Hull Analyses

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Bing Yan ; Dept. of Electr. & Comput. Eng., Univ. of Connecticut, Storrs, CT, USA ; Hsin Yuan Chen ; Luh, P.B. ; Wang, S.
more authors

The increasing pressure to meet demand are forcing semiconductor manufacturers to seek efficient scheduling methods. Lithography, with a limited number of expensive resources and the reentrant nature of the fabrication processes, is a major bottleneck. This paper presents a litho machine scheduling formulation for high-volume and low-variety manufacturing over a day, with novel modeling of resource setups, reticle expirations, and future stacking layer load balancing. The problem is believed to be NP hard. After linearization and simplification, it is solved by using the branch-and-cut method by exploiting problem linearity. Near-optimal solutions for practical problems, however, are still difficult to obtain efficiently. Through detailed analyses, it was discovered that the convex hull of the problem is difficult to delineate and many low-efficient branching operations are needed. A two-phase approach is therefore established. In the first phase, a simplified problem with certain complicating constraints dropped is efficiently solved by exploiting linearity to reduce ranges of decision variables. The problem with the full set of constraints is then solved in the second phase with a much reduced decision space. Numerical testing shows that this two-phase approach can generate near-optimal schedules within reasonable amounts of computation time. This two-phase approach is generic, and will have major implications on other semiconductor scheduling problems and beyond.

Published in:

Automation Science and Engineering, IEEE Transactions on  (Volume:10 ,  Issue: 4 )

Date of Publication:

Oct. 2013

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.