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Corrections to “Multifunction Thermopile Sensors Fabricated With a MEMS-Compatible Process” [May 13 242-247]

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6 Author(s)

In the above paper (ibid., vol. 26, no. 2, pp. 242-247, May 2013), changes should have been reflected in the final, published work, but were not. These changes are presented here.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:26 ,  Issue: 3 )