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This paper discusses the development and analysis of a transfer function model of the peaking capacitor and peaking switch for an input from Marx generator and an output across load. The effect of variations of gap distance, pressure, peaking capacitor, and the input pulse rise time on the rise time of the output pulse is simulated using this model. For a given geometry, the modeling gives an optimum input pulse rise time and the effect of variation of peaking capacitor on various output parameters. The results obtained from modeling are validated with the experimental results.