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Moore's Law represents the cumulative effort by many participants to advance the productivity of electronic systems over the last 40+ years, resulting in enormous strides in the capability and ubiquity of electronics. This paper identifies the innovation challenges the semiconductor industry must overcome in order to propel the advance of semiconductor technology to the cadence of Moore's Law. Key examples will highlight the solutions needed to enable advanced transistor and nano-scale interconnect fabrication. Solutions for tomorrow's low voltage, low power process technologies will introduce new materials, unprecedented levels of interface control and new energy sources while at the same time addressing the increasing cost and complexity needed to sustain Moore's Law well into the future.