Pulse Power Nanosecond-Range DSRD-Based Generators for Electric Discharge Technologies

New design of power nanosecond-range generators for electric discharge in gases is described. These generators are based on semiconductor opening switches-Drift Step Recovery Diodes (DSRD). The main advantages of DSRD are very short switching-off time (<;3 ns), high commutated power (>500 kW for single DSRD with 2 cm
²
of semiconductor structure), and high reliability of high voltage stacks consisting of many connected in series DSRD. The experimental results of DSRDbased generator application for ozone production and waste gas cleaning are presented. The main parameters of the generators: output pulse voltage up to 36 kV, pulse rise time <;4 ns, pulse repetition rate up to 3.5 kHz, output pulse power >4.5 MW.