Cart (Loading....) | Create Account
Close category search window

Prediction and Control of Transistor Threshold Voltage by Virtual Metrology (Virtual PCM) Using Equipment Data

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Tanaka, T. ; Panasonic Corp., Uozu, Japan ; Yasuda, S.

This paper is a description of how to predict and control the transistor threshold voltage ( Vth) for an advanced system on chip (SoC) by virtual metrology (VM), which we call virtual process control module (PCM), by using equipment data. Impact analysis for Vth variation by using a Virtual PCM model indicates that the impact of source and drain (S/D) resistance and extension resistance are comparable with that of the shape factor (i.e., gate length, sidewall width). Virtual metrology models for the resistance were developed to control and predict Vth. As a result of the VM control, Vth variation was reduced by 28%. Moreover, in-process prediction of Vth was put into practical use.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:26 ,  Issue: 3 )

Date of Publication:

Aug. 2013

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.