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Texture etched Al-doped ZnO: a new material for enhanced light trapping in thin film solar cells

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12 Author(s)
Kluth, O. ; Forschungszentrum Julich GmbH, Germany ; Loffl, A. ; Wieder, S. ; Beneking, C.
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We found that sputtered ZnO:Al films with an appropriate compact structure develop a surface texture during etching in diluted HCl with excellent optical and light trapping properties. Moreover, these texturable films have a high optical transmission and good electrical properties which are not affected by the etching process. An analysis of the film structure by HRSEM is presented. High short-circuit currents have been achieved for a-Si:H solar cells incorporating these films as TCO substrates

Published in:

Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE

Date of Conference:

29 Sep-3 Oct 1997

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