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Method of Fabrication for Encapsulated Polarizing Resonant Gratings

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4 Author(s)
Aaron Joseph Pung ; Holcombe Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA ; Scott R. Carl ; Indumathi Raghu Srimathi ; Eric G. Johnson

In this letter, we present a novel method of fabricating encapsulated resonant gratings. The fabrication method uses selective etching, conformal deposition, conventional lithography, and direct bonding techniques. Our letter includes simulation and experimental results, confirming a strong resonance unique to the TE polarization at 1550 nm with a 5 nm full-width at half-maximum.

Published in:

IEEE Photonics Technology Letters  (Volume:25 ,  Issue: 15 )