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Flexible Carbon Nanotube Based Gas Sensors Fabricated by Large-Scale Spray Deposition

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7 Author(s)
Abdellah, A. ; Dept. of Electr. Eng. & Inf. Technol., Tech. Univ. Munchen, Munich, Germany ; Abdelhalim, A. ; Loghin, F. ; Kohler, P.
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Carbon nanotubes (CNTs) are demonstrated as one of the most interesting materials for gas sensing. The possibility to obtain CNT thin-films via solution-processing techniques has paved the way for low-cost applications of such sensors. In this paper, we demonstrate that high performance gas sensors based on CNT thin-films can be obtained by direct spray deposition onto flexible substrates. The results obtained for NH3 sensing using CNT films deposited on polyimide show exceptionally high as well as immediate response to the test gas, with performance comparable with that obtained on oxidized silicon substrates. In addition, a good repeatability of the sensor response to defined gas concentrations is demonstrated. This represents a major step toward low-cost large-scale production of this class of devices.

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Sensors Journal, IEEE  (Volume:13 ,  Issue: 10 )