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Technology CAD for smart power devices

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4 Author(s)
Simlinger, T. ; Inst. for Microelectron., Tech. Univ. Vienna, Austria ; Pichler, C. ; Plasun, R. ; Selberherr, S.

Technology CAD has already proven to be an attractive supplement to standard process development methodologies for VLSI technology. The Vienna Integrated System for TCAD Applications is such a simulation environment which offers great flexibility and a large number of tools for process development. On the other hand smart power devices gain increasingly interest for applications which need to combine low voltage logic and power output devices as, e.g. for automotive electronics. The flexibility of TCAD makes it also applicable for smart power technology to cut down development costs and cycle times

Published in:

Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International  (Volume:2 )

Date of Conference:

7-11 Oct 1997

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