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A Magnetic Membrane Actuator in Composite Technology Utilizing Diamagnetic Levitation

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2 Author(s)
Wolfgang Hilber ; Institute of Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria ; Bernhard Jakoby

We present the application of diamagnetic levitation of a small floater magnet for the realization of a magnetically actuated membrane actuator in polymer composite technology. Following this approach the neutral position of the actuating membrane can be adjusted by diamagnetically stabilized levitation and the actuation of the membrane is induced by an integrated coil which is driven by an ac-signal. This setup holds the advantage that the neutral position of the flexible membrane can be stabilized with no external energy input, and the separation of the off-position from the driving mechanism allows for many possible applications of the device in, for instance, microfluidic systems.

Published in:

IEEE Sensors Journal  (Volume:13 ,  Issue: 7 )