By Topic

Helicons-the past decade

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Chen, F.F. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Boswell, R.W.

First observed in gaseous plasmas in the early 1960s, helicon discharges lay like a sleeping giant until they emerged in the 1980s, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges. Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one. The most recent results indicate that a nonobvious resolution of these problems is at hand

Published in:

Plasma Science, IEEE Transactions on  (Volume:25 ,  Issue: 6 )