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Vacuum arc ion sources-a brief historical review

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2 Author(s)
I. G. Brown ; Lawrence Berkeley Lab., CA, USA ; E. M. Oks

The production of energetic metal ion beams by vacuum arc ion sources is a subfield of ion beam science and technology that has experienced rapid growth and a great deal of research activity in the last decade or so. Interest in this kind of ion source derives from the high current of metal ions that can be produced-these are the defining and key properties of the source, and they open up areas of application that have not previously been readily accessible. We present a concise history of this field of activity. The background, history, and recent research and development are discussed

Published in:

IEEE Transactions on Plasma Science  (Volume:25 ,  Issue: 6 )