Vacuum arc ion sources-a brief historical review

The production of energetic metal ion beams by vacuum arc ion sources is a subfield of ion beam science and technology that has experienced rapid growth and a great deal of research activity in the last decade or so. Interest in this kind of ion source derives from the high current of metal ions that can be produced-these are the defining and key properties of the source, and they open up areas of application that have not previously been readily accessible. We present a concise history of this field of activity. The background, history, and recent research and development are discussed.