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Complex electron wave reconstruction using parameter estimation

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1 Author(s)
vand den Bos, /A/. ; Dept. of Appl. Phys., Delft Univ. of Technol.

A new method is proposed for the reconstruction of the complex valued exit wave of a periodic specimen in a transmission electron microscope. The method uses a series of images recorded at different defoci. From these, inherently noisy, images the parameters defining the wave are estimated. The method keeps the number of parameters as small as possible. In addition, in simulations, it has been found to always produce the exit wave estimate fitting best to the images recorded

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:46 ,  Issue: 4 )