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A system for the dynamic characterization of microstructures

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5 Author(s)
J. S. Burdess ; Dept. of Mech. Eng., Newcastle upon Tyne Univ., UK ; A. J. Harris ; D. Wood ; R. J. Pitcher
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This paper describes a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions). To validate the system, vibration measurements have been carried on two structures-a micromachined silicon cantilever and bridge-and the results are presented. Out-of-plane measurements show that for the cantilever, both the mode shapes and resonant frequencies agree with beam theory predictions. However, for the bridge structure, tension due to boron doping causes a change from beam-like behavior and a more complex model is required. Mode-shapes natural frequencies and modal damping are determined from data obtained by vibrating the structures using a piezoelectric mounting system and deriving the transfer function between the piezodrive voltage and beam vibrational velocity

Published in:

Journal of Microelectromechanical Systems  (Volume:6 ,  Issue: 4 )