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Browse Journals & Magazines > Microelectromechanical System ...> Volume:6 Issue:4 Help

Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

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3 Author(s)
Folch, Albert ; Dept. of Chem., MIT, Cambridge, MA, USA ; Wrighton, Mark S. ; Schmidt, M.A.

We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples

Published in:
Microelectromechanical Systems, Journal of  (Volume:6 ,  Issue: 4 )

Date of Publication: Dec 1997

Page(s):
303 - 306
ISSN :
1057-7157
INSPEC Accession Number:
5785224
Digital Object Identifier :
10.1109/84.650126
Date of Current Version :
06 August 2002
Issue Date :
Dec 1997
Sponsored by :
IEEE Electron Devices Society

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