Cart (Loading....) | Create Account
Close category search window
 

Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Folch, Albert ; Dept. of Chem., MIT, Cambridge, MA, USA ; Wrighton, Mark S. ; Schmidt, M.A.

We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples

Published in:

Microelectromechanical Systems, Journal of  (Volume:6 ,  Issue: 4 )

Date of Publication:

Dec 1997

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.