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An efficient Monte Carlo simulator for low-pressure RF plasmas

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2 Author(s)
M. Ardehali ; Microelectron. Res. Labs., NEC Corp., Sagamihara, Japan ; H. Matsumoto

An efficient, self-consistent particle-in-cell/Monte Carlo (PIC/MC) plasma simulator has been developed. The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight. This splitting technique leads to substantial reduction of statistical noise within the sheath. The simulator has been used to model a radio frequency (RF) plasma at a pressure of 20 mTorr. The results of this simulator are compared with the results of the standard PIC/MC simulator

Published in:

IEEE Transactions on Plasma Science  (Volume:25 ,  Issue: 5 )