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Particle composition of high-pressure SF6 plasma with electron temperature greater than gas temperature

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4 Author(s)
Tanaka, Y. ; Dept. of Electr. Eng., Nagoya Univ., Japan ; Yokomizu, Y. ; Ishikawa, M. ; Matsumura, T.

Numerical computation was performed to derive particle compositions of high-pressure SF6 plasmas in which the electron temperature Te is greater than the gas temperature T g. The effective excitation temperature Tex for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in a two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed Tg in the range of 6000-9000 K, the increasing Te from 9000-20 000 K encourages the dissociation and ionization of particles, causing the composition of SF6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium

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Plasma Science, IEEE Transactions on  (Volume:25 ,  Issue: 5 )