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Enhancement of Open-circuit Voltage Using CF4 Plasma Treatment on Nitric Acid Oxides

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6 Author(s)
Je-Wei Lin ; Dept. of Electrophys., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Chien-Hung Wu ; Sheng-Wei Wu ; Wei-Ping Hseih
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Surface passivation of solar cells is investigated using CF4 plasma treatment on low-temperature oxides to enhance the open-circuit voltage of the solar cells. Low-temperature oxides grown by a nitric acid solution are treated with the CF4 plasma. Solar cells undergoing this scheme show an improved performance, including low-saturation current density and good quantum efficiency at short wavelengths. Experimental results demonstrate that the CF4 plasma pretreatment on low-temperature oxides can significantly improve the open-circuit voltage, short-circuit current, and fill factor for silicon wafer-based solar cells. This technique is very promising for in-line solar cell manufacturing.

Published in:

Electron Device Letters, IEEE  (Volume:34 ,  Issue: 5 )