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A Literature Review on Sampling Techniques in Semiconductor Manufacturing

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6 Author(s)
Nduhura-Munga, J. ; Centre Microelectron. de Provence, Ecole des Mines de St.-Etienne, Gardanne, France ; Rodriguez-Verjan, G. ; Dauzere-Peres, S. ; Yugma, C.
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This paper reviews sampling techniques for inspection in semiconductor manufacturing. We discuss the strengths and weaknesses of techniques developed in the last last 20 years for excursion monitoring (when a process or machine falls out of specifications) and control. Sampling techniques are classified into three main groups: static, adaptive, and dynamic. For each group, a classification is performed per year, approach, and industrial deployment. A comparison between the groups indicates a complementarity strongly linked to the semiconductor environment. Benefits and drawbacks of each group are discussed, showing significant improvements from static to dynamic through adaptive sampling techniques. Dynamic sampling seems to be more appropriate for modern semiconductor plants.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:26 ,  Issue: 2 )