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Multifunction thermopile sensors fabricated with a MEMS-compatible process

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6 Author(s)
Li-min Sin ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Tai-Tou Pan ; Chun-Wei Tsai ; Chia-feng Chou
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In this paper, we present micromachined multifunction thermopile sensors based on the Seebeck effect. A single sensor is able to perform measurement on temperature, pressure, humidity, and percentage of a gas constituent. Three different designs are employed and compared.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:26 ,  Issue: 2 )