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Multifunction thermopile sensors fabricated with a MEMS-compatible process

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6 Author(s)
Li-min Sin ; Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan ; Tai-Tou Pan ; Chun-Wei Tsai ; Chia-feng Chou
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In this paper, we present micromachined multifunction thermopile sensors based on the Seebeck effect. A single sensor is able to perform measurement on temperature, pressure, humidity, and percentage of a gas constituent. Three different designs are employed and compared.

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IEEE Transactions on Semiconductor Manufacturing  (Volume:26 ,  Issue: 2 )