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Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography

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7 Author(s)
Takei, R. ; National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, 305-8568, Japan and Institute for Photonics-Electronics Convergence System Technology (PECST), Tsukuba, Ibaraki, 305-8568, Japan ; Suzuki, M. ; Omoda, E. ; Manako, S.
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For ultralow-loss and polarization-insensitive spot-size converters (SSCs) on a silicon platform, we propose and demonstrate a silicon knife-edge taper waveguide with a gradual decrease in height as well as width toward the taper end. The taper was fabricated using a double-patterning method involving i-line stepper photolithography and angled sidewall dry-etching. The SSC, with the knife-edge taper covered with a polymer secondary core, exhibited mode conversion losses of 0.35 and 0.21 dB for transverse electric-like and transverse magnetic-like modes, respectively.

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Applied Physics Letters  (Volume:102 ,  Issue: 10 )