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Monolithic composite-sensors designed and fabricated by a low-cost single-side ‘SiN/poly-Si/Al’ multi-user process-module for versatile sensing-network nodes

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8 Author(s)
Zao Ni ; State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China ; Chen Yang ; Dehui Xu ; Hong Zhou
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We report a newly developed design/fabrication module with low-cost single-side `low-stress-SiN/polysilicon (poly-Si)/Al' process for monolithic integration of composite-sensors in versatile sensing-network nodes. A `pressure + acceleration + temperature + infrared' (PATIR) composite sensor is demonstrated, featuring a front-side surface-/bulk-micromachining process with multifunctional SiN/poly-Si/Al layers design, which is very promising for low-cost easy-to-customize sensing networks.

Published in:

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Date of Conference:

20-24 Jan. 2013