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We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of 0.006 (°/s)/√Hz. Without precise control of temperature, the minimum Allan deviation is 3.29 °/hr.
Date of Conference: 20-24 Jan. 2013