By Topic

Highly sensitive pressure sensor using a gold-coated elastic pyramid array pressing on a resistor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
N. Thanh-Vinh ; The University of Tokyo, Tokyo, Japan ; K. Matsumoto ; I. Shimoyama

We propose a highly sensitive pressure sensor using an elastic micro pyramid array with a gold-coated surface pressing on a resistive silicon beam. When a pressure was applied on the pyramid array, the deformation of each pyramid induced the larger contact area between each pyramid and the resistor. Since the pyramid array was coated by a gold layer, which had much lower resistivity than that of the silicon beam, the resistance of each contact area drastically decreased. Therefore the resistance between two electrodes of the silicon beam decreased. Our demonstrated sensor showed the non-linear response to the applied pressure, which was caused by the increase in elasticity of each pyramid as its deformation became larger. This non-linear property can be used as an advantage to enlarge the sensing range of the sensor. The sensitivity of our sensor for the pressure from 0 to 1 kPa was 0.61 kPa-1. The resolution derived from the largest error, was 0.16 kPa.

Published in:

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Date of Conference:

20-24 Jan. 2013