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On-chip integrated PS3 (Packaging-Stress Suppressed Suspension) for thermal-stress fress package of pressure sensors

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3 Author(s)
Jiachou Wang ; State Key Lab. of Transducer Technol., Inst. of Microsyst. & Inf. Technol., Shanghai, China ; Lijian Yang ; Xinxin Li

A compact suspension-structure is on-chip integrated surrounding to a piezoresistive pressure sensing diaphragm for elimination of packaging-stress induced instability. The novel technology is named by us as PS3 (Packaging-Stress Suppressed Suspension). Using one single-side polished wafer and micromachining process only from the front-side, the cantilever-like PS3 structure is formed compactly around a piezoresistive pressure sensor to provide a packaging-process/substrate friendly method for low-cost but high-performance sensors. The tested results show that the sensor with PS3 structure has the same linear output sensitivity of 0.046mV/kPa as the sensor without PS3 structure has. But, the temperature-drift of the sensor with PS3 is only 0.016%/°C-FS that is about 15 times better than that of sensor without PS3. Obviously, the PS3 technique effectively eliminates the packaging-stress.

Published in:

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Date of Conference:

20-24 Jan. 2013