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Observation of Positive Self-Bias in Radio Frequency Atmospheric Pressure Microplasmas

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2 Author(s)
Qiang Chen ; Grad. Sch. of Sci. & Eng., Saitama Univ., Saitama, Japan ; Junshuai Li

Negative self-bias is well known at the powered small-sized electrode in low-pressure capacitive-coupled discharge plasmas. In this paper, however, the self-bias at the powered electrode observed in an RF atmospheric-pressure microplasma demonstrates either a positive or negative sign depending on the supplied power and interelectrode gap.

Published in:

Plasma Science, IEEE Transactions on  (Volume:41 ,  Issue: 4 )