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Technology of in situ charge promotes the development of MEMS safety and arming device

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3 Author(s)
Zou Jinlong ; Sci. & Technol. on Electromech. Dynamic Control Lab., Xi'an, China ; Li Xiaojie ; Lei Yaru

Based on the reading and the analyzing of relative literatures, this paper introduced basic concepts and fabrication processes of two in situ charge technologies - porous silicon energetic material and converting porous metal to primary explosive based on silicon process, and analyzed the structures and working principles of the micro-donators with two in situ charge technologies. This paper also introduced latest process of explosive train of the MEMS S&A. On these bases, the structure and working principle of silicon MEMS S&A proposed by US army was discussed, and this MEMS S&A is based on in situ charge and suitable for wafer-level mass fabrication. Some views about the development of the silicon MEMS S&A were also put forward.

Published in:

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on

Date of Conference:

Aug. 29 2012-Sept. 1 2012