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Automated Pick-Place of Silicon Nanowires

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6 Author(s)
Xutao Ye ; Dept. of Mech. & Ind. Eng., Univ. of Toronto, Toronto, ON, Canada ; Yong Zhang ; Changhai Ru ; Jun Luo
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Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires's properties. Nanowire pick-place has been typically performed via teleoperation, which is time-consuming and highly skill-dependent. This paper presents an automated approach to the pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system automatically transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowires's electromechanical properties. The performance of the nanorobotic pick-up and placement procedures was experimentally quantified.

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Automation Science and Engineering, IEEE Transactions on  (Volume:10 ,  Issue: 3 )