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In this paper, we have studied a new kind of terahertz (THZ) antenna: integrated MEMS pyramidal horn antennas. These antennas have interesting characteristics for THz applications: large bandwidth, low reflection coefficient and good directivity. The processing of this type of horn antenna is KOH etching of silicon. The structure of the antennas includes two parts, pyramidal horn and inverted pyramidal horn for feed, the fabrication of them need only one wafer. There are many tunable parameters of the horn, so that high performance THz antennas can be achieved by synthesizing these parameters. The proposed antennas can be composed by MEMS processing with low fabrication cost, which are suitable for many terahertz systems, such as in THz radar, communication and imaging system.