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Silicon microring resonator sensors for the detection of volatile organic compounds

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4 Author(s)
Dongliang Fu ; Bioelectronics Program, A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Qing Liu ; Kee, J.S. ; Mi Kyoung Park

We demonstrate a volatile organic compounds (VOC) gas detection using silicon based microring resonator devices. Polymer is chemically attached to sidewall of silicon waveguide and microring as a cladding layer. Absorption of VOC gases into the polymer film induces a resonance wavelength shift. A detection limit of 10 part per million (ppm) for both toluene and acetone has been achieved.

Published in:

Photonics Global Conference (PGC), 2012

Date of Conference:

13-16 Dec. 2012

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