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Micromachined piezoelectric microphones with in-plane directivity are introduced. A beam rotates about center torsional pivots and is attached to piezoelectrically active end-springs. Rotation of the beam in response to sound pressure gradients produces spring deflections, which, in turn, produce an open-circuit voltage at the piezoelectric films. Prototypes are presented that contain a 20-μm-thick silicon beam and end-springs with 900-nm-thick chemical solution deposited lead zirconate titanate atop the surface of the end-springs. Acoustic directivity measurements are presented that confirm device functionality.
Published in:
Applied Physics Letters
(Volume:102
,
Issue:
5
)
Date of Publication: Feb 2013
- Page(s):
- 054109 - 054109-4
- ISSN :
- 0003-6951
- Digital Object Identifier :
- 10.1063/1.4776687
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 11 February 2013
- Issue Date :
- Feb 2013
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