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In the design of radiation tolerant precision ADCs targeted for space market, a matched capacitor array is crucial. The drift of capacitance ratios due to radiation should be small enough not to cause linearity errors. Conventional methods for measuring capacitor matching may not achieve the desired level of accuracy due to radiation induced gain errors in the measurement circuits. In this work, we present a circuit and method for measuring capacitance ratio drift to a very high accuracy (<; 1 ppm) unaffected by radiation levels up to 150 krad.