Referenced Items are not available for this document.
We present a general methodology for the realization of practical micro-optical systems, specifically, a miniature Fourier transform spectrometer, through the use of a newly developed microfabrication technique called microjoinery. Using microjoinery, we have microfabricated a number of translational and positioning stages ideally suited for use in micro-optical systems
Published in:
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
(Volume:2
)
Date of Conference: 10-13 Nov 1997
- Page(s):
- 474 - 475 vol.2
- Meeting Date :
- 10 Nov 1997-13 Nov 1997
- ISSN :
- 1092-8081
- Print ISBN:
- 0-7803-3895-2
- INSPEC Accession Number:
- 5855686
- Conference Location :
- San Francisco, CA
- Digital Object Identifier :
- 10.1109/LEOS.1997.645524
- Product Type:
- Conference Publications
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