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A Microfabricated Planar Digital Microrobot for Precise Positioning Based on Bistable Modules

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3 Author(s)
Vincent Chalvet ; Automatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174 - UFC/ENSMM/UTBM, France ; Yassine Haddab ; Philippe Lutz

Size reduction is a constant objective in new technologies for which very accurate devices are needed when manipulating submillimetric objects. A new kind of microfabricated microrobot based on the use of bistable modules is designed to perform open-loop controlled micropositioning tasks. The DiMiBot (a specific digital microrobot) opens a new paradigm in the design of microrobots by using mechanical stability instead of complex control strategies. We propose a new architecture of digital microrobot for which forward and inverse kinematics models are easy to use. These kinematic models are validated with finite-element-analysis simulations before the fabrication of a real DiMiBot prototype. Tests and characterization of the prototype are made and compared with the desired behavior. Thanks to its submicrometric resolution and to its small dimensions (~ 400-μm thickness), it is able to manipulate microobjects in confined environments, where no other robot can be used.

Published in:

IEEE Transactions on Robotics  (Volume:29 ,  Issue: 3 )