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Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography

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7 Author(s)
Jung-Hun Seo ; Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA ; Jungho Park ; Deyin Zhao ; Hongjun Yang
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We report here large-area broadband photonic crystal membrane reflectors (MRs) on glass substrates based on laser interference lithography (LIL) patterning and elastic stamp membrane transfer printing techniques. High-reflectivity broadband MRs on glass were realized with measured reflectivity of 95% around 1300 nm and a bandwidth of about 100 nm. Large-area nanopattern uniformity was experimentally verified with measured reflectivity from multiple locations of the large-area MRs. The work could lead to fabrication of the large-area high-performance MR at low cost with high throughput. The reflectors can be used in many types of optoelectronic and photonic devices.

Published in:

Photonics Journal, IEEE  (Volume:5 ,  Issue: 1 )