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Novel optical probing system for quarter-μm VLSI circuits

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6 Author(s)
Ozaki, K. ; Fujitsu Labs. Ltd., Atsugi, Japan ; Sekiguchi, H. ; Wakana, S. ; Goto, Y.
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An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and high speed. We have introduced a novel optical probing system applicable to quarter-μm VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-μm spatial resolution by utilizing the scanning force microscope technique. This system can measure internal signal waveforms of VLSI circuits much faster than e-beam testers, and can measure the DC voltage level, which is not possible with e-beam testers

Published in:

Test Symposium, 1997. (ATS '97) Proceedings., Sixth Asian

Date of Conference:

17-19 Nov 1997

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