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Special Section on the 2011 Advanced Semiconductor Manufacturing Conference

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3 Author(s)
Oliver D. Patterson ; IBM, Hopewell Junction, NY, USA ; Paul Werbaneth ; Eric Eisenbraun

The six papers in this special section are enhanced versions of papers presented at the 22nd annual Advanced Semiconductor Manufacturing Conference (ASMC), held in Sarasota Springs, NY, in 2011.

Published in:

IEEE Transactions on Semiconductor Manufacturing  (Volume:26 ,  Issue: 1 )