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A Survey of Yield Modeling and Yield Enhancement Methods

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1 Author(s)
Milor, L. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Fast yield learning is critical to bringing products to the market in a timely fashion and is strongly linked to product revenues. This paper reviews methods to enable efficient yield learning, focusing on methods to quantify the most significant yield detractors and on in-line excursion detection methodologies.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:26 ,  Issue: 2 )