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The integration of SnO2 thin-film onto micro-hotplate for gas sensor applications

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3 Author(s)
Lie-Yi Sheng ; Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong ; Chan, Philip C.H. ; Sin, J.K.O.

Anisotropic silicon etching techniques have been widely used in various microsensors to create thermally isolated structures or micro-hotplate (MHP). EDP (Ethylene-diamine-pyrocatechol) is one of the most commonly used anisotropic etchants because of its high selectivity of silicon compared to masking materials such as silicon dioxide. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, we need to find a way to photolithographically pattern the SnO2 thin-film. In this paper we report results from such experiments

Published in:

Electron Devices Meeting, 1997. Proceedings., 1997 IEEE Hong Kong

Date of Conference:

30 Aug 1997