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Micrometer-scaled cantilever-based sensors can be utilized in electrostatic and magnetic measurements and also are perspective for future chemical and biological sensing applications. GaAs is the most used III-V material for cantilever probe development thanks to its optoelectronic properties, high mobility 2D electrons, high piezoresistivity and sufficient mechanical properties. Novel sensing probes, prepared by integration of various detection elements are perspective for specific requirements. This work is mainly focused on technology process of such micro-CLs and also on fabrication of detection elements (transistors) with the aim to integrate directly on the micro-CLs.