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The influence of deuterated diamond like carbon films technology and properties on quantum efficiency of prepared photocathode has been investigated. Deuterated diamond like carbon films were deposited on silicon substrate and stainless steel mesh by PECVD from gas mixture CH4 and D2 and reactive magnetron sputtering using carbon target and gas mixture Ar and D2. The concentration of elements in films was determined by RBS and ERD. Chemical compositions were analyzed by FT-IR. Raman spectroscopy at visible excitation wavelength was used for I(D)/I(G) ratio determination. The quantum efficiency was calculated from the measured laser energy and the measured cathode charge.