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Nano SNIS Junctions Fabricated by 3D FIB Sculpting for Application to Digital Electronics

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6 Author(s)
Matteo Fretto ; Istituto Nazionale di Ricerca Metrologica, INRiM, Torino, Italy ; Emanuele Enrico ; Natascia De Leo ; Luca Boarino
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Overdamped Josephson junctions based on a Nb/Al-AlOx/Nb superconductor-normal metal-insulator-superconductor structure were realized at the submicrometer scale by using focused ion beam nano-sculpting technique. This approach represents an alternative solution to the classical electron beam lithography and allows for an accurate control of the junction dimensions. Superconductor-normal metal-insulator-superconductor structured junctions were downscaled to about 300 × 300 nm2 and electrically measured at 4.2 K. The simple fabrication process, leading to high current density, Jc, and characteristic voltage, Vc, values and good uniformity, makes these junctions promising as elementary cell in complex circuits for rapid single flux quantum and ac voltage standard applications.

Published in:

IEEE Transactions on Applied Superconductivity  (Volume:23 ,  Issue: 3 )