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An in-channel micro check valve fabricated using a simple two-mask process

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3 Author(s)
Hongen Tu ; Dept. of Electr. & Comput. Eng., Wayne State Univ., Detroit, MI, USA ; Kim, E. ; Yong Xu

Check valves play a pivotal role in many microfluidic and lab-on-chip systems. Many of these check valves are out of plane and are not integrated with microchannels. To address this issue we proposed an in-channel micro check valve design which enables a simple fabrication process and provides easy integration with other microfluidic devices. Parylene C was used as the structural material of the gate for the check valve. Due to the high flexibility of the parylene C gate, we can achieve a high flow rate with a relatively low pressure. Also due to the perfect position of our parylene gate, only minimal reverse flow (~1nl/min) was observed at reverse pressures as high as 50kPa.

Published in:

Sensors, 2012 IEEE

Date of Conference:

28-31 Oct. 2012