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A highly fast capacitive-type humidity sensor using percolating carbon nanotube films as a porous electrode material

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5 Author(s)
Hyun Pyo Hong ; Dept. of Control & Instrum. Eng., Korea Univ., Sejong, South Korea ; Kyung Hoon Jung ; Nam Ki Min ; Yong Hoon Rhee
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Open porous multi-walled carbon nanotube (MWCNT) film networks were used as an upper electrode of polyimide (PI)-based capacitive humidity sensor for highly fast response time. MWCNT films were deposited by spray-dry method and patterned by O2 plasma. PI capacitive humidity sensors with MWCNT film electrodes showed a very short response time of less than 3 s and a good linearity of 0.9995 compared to the humidity sensors with porous Cr electrodes. The large improvement in response time was explained on the base of a percolated pore network that is more accessible for water molecules.

Published in:

Sensors, 2012 IEEE

Date of Conference:

28-31 Oct. 2012

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