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Modular Optoelectronic Microfluidic Backplane for Fluid Analysis Systems

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5 Author(s)
Brammer, M. ; Festo AG, Esslingen, Germany ; Megnin, C. ; Voigt, A. ; Kohl, M.
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We report on the development of backplane modules with integrated microvalves and optical switches enabling custom-made system design of analysis systems. The backplane modules are reversibly interconnected by magnetostatic connectors and provide optical and fluidic coupling to four neighboring backplane modules and one optical sensor module, which is mounted on top. This concept allows for selectively guiding fluids and light to the sensor modules to be operated. We integrated shape memory alloy (SMA) microvalves in different designs and two kinds of optical switches, i.e., one linearly actuated assembly of optical elements and one based on an electrostatically deflectable mirror. We manufactured the modules in polymers and carried out optical and fluidic characterization. The functionality of the backplane is demonstrated by interconnecting two optical sensor modules with integrated spectrometer and photodiode color sensor, respectively. Herewith, we carried out fluorescence transmission experiments.

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Microelectromechanical Systems, Journal of  (Volume:22 ,  Issue: 2 )